公开(公告)号：US08008629B2

公开(公告)日：2011-08-30

申请号：US11781794

申请日：2007-07-23

申请人： Pavel Adamec ,  Shemesh Dror

发明人： Pavel Adamec ,  Shemesh Dror

IPC分类号： G01N23/00

CPC分类号： H01J37/1472 ,  H01J37/1478 ,  H01J37/28 ,  H01J2237/1506 ,  H01J2237/2811 ,  H01J2237/2814

摘要： A charged particle beam device is provided. The device includes a primary objective lens for focusing a primary charged particle beam, the primary objective lens defining an optical axis, a specimen stage defining a specimen location area, a deflection unit for deflecting the primary charged particle beam between the primary objective lens and the specimen location area, towards a beam path for impingement on the specimen, wherein the deflection unit is movable with respect to the optical axis.

摘要翻译： 提供带电粒子束装置。 该装置包括用于聚焦初级带电粒子束的主物镜，限定光轴的主物镜，限定样本位置区域的样本台，用于使主要物镜和第一物镜之间的初级带电粒子束偏转的偏转单元 样本定位区域，朝向用于冲击样本的光束路径，其中偏转单元可相对于光轴移动。

公开(公告)号：US20080048116A1

公开(公告)日：2008-02-28

申请号：US11781794

申请日：2007-07-23

申请人： PAVEL ADAMEC ,  SHEMESH DROR

发明人： PAVEL ADAMEC ,  SHEMESH DROR

IPC分类号： G01N23/00

CPC分类号： H01J37/1472 ,  H01J37/1478 ,  H01J37/28 ,  H01J2237/1506 ,  H01J2237/2811 ,  H01J2237/2814

摘要： A charged particle beam device is provided. The device includes a primary objective lens for focusing a primary charged particle beam, the primary objective lens defining an optical axis, a specimen stage defining a specimen location area, a deflection unit for deflecting the primary charged particle beam between the primary objective lens and the specimen location area, towards a beam path for impingement on the specimen, wherein the deflection unit is movable with respect to the optical axis.

摘要翻译： 提供带电粒子束装置。 该装置包括用于聚焦初级带电粒子束的主物镜，限定光轴的主物镜，限定样本位置区域的样本台，用于使主要物镜和第一物镜之间的初级带电粒子束偏转的偏转单元 样本定位区域，朝向用于冲击样本的光束路径，其中偏转单元可相对于光轴移动。