公开(公告)号：US4925388A

公开(公告)日：1990-05-15

申请号：US411224

申请日：1989-09-22

申请人： Izuru Iseki ,  Akihiro Higashi ,  Seihiro Sasaki

发明人： Izuru Iseki ,  Akihiro Higashi ,  Seihiro Sasaki

IPC分类号： C23C16/46 ,  C30B31/12 ,  C30B31/16 ,  C30B31/18 ,  C30B33/00 ,  F27B5/16 ,  H01L21/205 ,  H01L21/22 ,  H01L21/31

CPC分类号： C30B33/00 ,  C30B31/12 ,  C30B31/16 ,  C30B31/18 ,  F27B5/16

摘要： An apparatus for heat treating and quickly cooling substrates. The apparatus includes a cylindrical furnace core tube for containing substrates, a heater enclosing the furnace core tube, and outer cylinder enclosing and containing the furnace core tube and the heater, a blower for drafting cooling air to the space between the furnace core tube and the outer cylinder along the longitudinal direction of the furnace core tube, and a switching valve connected between the blower and both ends of the outer cylinder for switching the direction in which the cooling air travels. Since the direction of the cooling air is changed, the entire furnace core tube is uniformly cooled.

摘要翻译： 一种热处理和快速冷却基板的设备。 该装置包括用于容纳基板的圆柱形炉芯管，包围炉芯管的加热器和封闭并容纳炉芯管和加热器的外筒，用于将冷却空气抽吸到炉芯管和炉芯管之间的空间的鼓风机 外筒沿着炉芯管的长度方向，以及连接在鼓风机与外筒的两端之间的切换阀，用于切换冷却空气行进的方向。 由于冷却空气的方向改变，整个炉芯管被均匀地冷却。