公开(公告)号：US20060196283A1

公开(公告)日：2006-09-07

申请号：US11306766

申请日：2006-01-10

Applicant: Kai Yang ,  Sheng-Hun Jeng ,  Yu-Ting Lin

Inventor： Kai Yang ,  Sheng-Hun Jeng ,  Yu-Ting Lin

IPC: G01N19/00 ,  B24B49/00

CPC classification number: G01B21/08 ,  B24B37/013 ,  B24B49/00 ,  G01N2203/0075

Abstract: An apparatus for measuring the thickness profile and elastic modulus profile of a polishing pad comprise an eddy current sensor and a mechanism to press the eddy current sensor against the polishing pad. The pad thickness is given by the signal of the eddy current sensor. The elastic modulus of the polishing pad is extracted from measurements at different forces applied to the eddy current sensor. The thickness profile and elastic modulus profile of the polishing pad are obtained by scanning the measurement across the whole polishing pad or along a diameter of the polishing pad. The pad thickness profile is used to adjust pad conditioning recipe so that more pad materials is eroded away at thicker area of the pad. By employing the apparatus of present invention, the thickness uniformity of a polishing pad can be better maintained, resulting in longer pad lifetime and better CMP removal rate uniformity.

Abstract translation: 用于测量抛光垫的厚度分布和弹性模量分布的装置包括涡流传感器和将涡流传感器压靠抛光垫的机构。 焊盘厚度由涡流传感器的信号给出。 抛光垫的弹性模量从施加到涡流传感器的不同力的测量中提取出来。 抛光垫的厚度分布和弹性模量分布是通过扫描整个抛光垫或沿研磨垫的直径进行测量而得到的。 衬垫厚度轮廓用于调整衬垫调节配方，使得更多的衬垫材料在衬垫的较厚区域被侵蚀掉。 通过采用本发明的装置，可以更好地保持抛光垫的厚度均匀性，从而延长焊垫寿命和更好的CMP去除速率均匀性。

公开(公告)号：US06524523B1

公开(公告)日：2003-02-25

申请号：US09964328

申请日：2001-09-28

Applicant: Sheng-Hun Jeng ,  Ming-Che Hsu

Inventor： Sheng-Hun Jeng ,  Ming-Che Hsu

IPC: B22F704

CPC classification number: B24B53/017 ,  B22F7/04 ,  B24D18/00 ,  C23C24/08 ,  C23C24/10 ,  C23C26/00 ,  C23C26/02

Abstract: A method for forming dresser of chemical mechanical polishing pad, firstly to make a stainless steel bottom seat. Then preparing metal welding powder and organic glue, mixing the aforesaid metal welding powder, organic glue and adequate ratio of water to welding thick liquid and uniformly distributing or pasting it on the aforesaid dresser bottom seat to form the sintering layer. The aforesaid metal welding material includes the active metal with diamond can form metal carbonate. Then using the computer visual inspection system to proceed the diamond powder distribution, uniformly distributing them for 60 to 2500 grains per square centimeter. Proceeding the sintering process to make the friction layer of chemical mechanical polishing pad dresser.

Abstract translation: 一种形成化学机械抛光垫梳妆台的方法，首先制作不锈钢底座。 然后制备金属焊粉和有机胶，将上述金属焊粉，有机胶和足量比例的水混合，焊接稠厚液体，均匀分布或粘贴在上述修整器底座上，形成烧结层。 上述金属焊接材料包括具有金刚石的活性金属可以形成金属碳酸盐。 然后使用电脑视觉检查系统进行金刚石粉末分配，均匀分布，每平方厘米60〜2500粒。 进行烧结工艺，使化学机械抛光垫修整器的摩擦层。