公开(公告)号：US06720996B1

公开(公告)日：2004-04-13

申请号：US09600414

申请日：2000-07-17

申请人： Motohiro Suyama ,  Shogo Ema ,  Tadashi Maruno

发明人： Motohiro Suyama ,  Shogo Ema ,  Tadashi Maruno

IPC分类号： H04N5225

CPC分类号： H01J31/26 ,  G01J1/42 ,  H01J2231/50015 ,  H01J2231/50073

摘要： In order to provide an imaging apparatus that uses an electron-bombarded multiplying tube with an internal solid imaging device with a long life, improved S/N ratio, high resolution, and moreover high sensitivity, an electron-bombarded multiplying tube with a photocathode 13 and a back-illuminated FT-CCD 11 sealed in a vacuum vessel is used as an imaging element. The vacuum vessel is made from a faceplate 12, a ceramic tube 16, and a ceramic stem 17. The photocathode 13 emits photo-electrons from a surface opposite from the incidence plane, in accordance with incident light. The FT-CCD 11 has an incidence plane disposed in the pathway of photo-electrons from the opposite surface. An imaging portion 11a of the FT-CCD 11 has pixels in the vertical direction in the same number as or in greater numbers than the number of output scan lines. A transfer electrode of the imaging portion 11a is constantly applied with a negative voltage during an image accumulation period. By this, dark current can be controlled, the S/N ratio can be improved, resolution can be maintained, and sensitivity can be improved.

摘要翻译： 为了提供使用电子轰击倍增管与具有长寿命，改善的S / N比，高分辨率以及高灵敏度的内部固体成像装置的成像装置，具有光电阴极13的电子轰击倍增管 并且将密封在真空容器中的背照式FT-CCD 11用作成像元件。 真空容器由面板12，陶瓷管16和陶瓷杆17制成。光电阴极13根据入射光从与入射面相反的表面发射光电子。 FT-CCD11具有从相对表面设置在光电子路径中的入射平面。 FT-CCD11的成像部11a在垂直方向上具有与输出扫描线数相同或数量多的像素。 成像部分11a的转印电极在图像累积期间恒定地施加负电压。 由此，可以控制暗电流，可以提高S / N比，可以保持分辨率，并且可以提高灵敏度。