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公开(公告)号:US07280448B2
公开(公告)日:2007-10-09
申请号:US10470727
申请日:2002-02-05
IPC分类号: G11B7/00
CPC分类号: G11B7/0956 , G05B2219/42338 , G11B5/59611 , G11B5/59622 , G11B5/59627 , G11B7/00
摘要: A positioning control device and method in which the relative position error in tracking is reduced by using the periodicity of position shift. The positioning control device comprises a position detecting unit for measuring the relative position error between the desired position of an objective member and a moving member, an adding unit for adding a position error signal output from the position detecting unit and a delay signal, a signal delay unit for outputting the delay signal which is obtained by delaying an output of the adding unit at a period corresponding to the position shift of the objective member, a drive unit for moving a moving member, and an inputting unit for inputting the signal of the sum of the position error signal and the delay signal to the drive unit and addition-inputting the delay signal to the drive unit through a filter having a predetermined frequency characteristic in a specific frequency range.
摘要翻译: 通过使用位置偏移的周期性来减少跟踪中的相对位置误差的定位控制装置和方法。 定位控制装置包括:位置检测单元,用于测量目标构件的所需位置与移动构件之间的相对位置误差;加法单元,用于将从位置检测单元输出的位置误差信号和延迟信号相加;信号 延迟单元,用于输出延迟信号,所述延迟信号是通过在与所述目标构件的位置偏移相对应的周期延迟所述加法单元的输出,用于移动移动构件的驱动单元和用于输入所述移动构件的信号的输入单元 将位置误差信号和延迟信号相加到驱动单元,并通过具有特定频率范围内的预定频率特性的滤波器将延迟信号相加输入到驱动单元。