公开(公告)号：US06911832B2

公开(公告)日：2005-06-28

申请号：US10620546

申请日：2003-07-16

申请人： Sivaramakrishna Kolachina ,  Srikanth M. Perungulam

发明人： Sivaramakrishna Kolachina ,  Srikanth M. Perungulam

IPC分类号： G01Q30/04 ,  G01Q40/02 ,  H01J37/305 ,  G01R31/305

CPC分类号： H01J37/3056 ,  H01J2237/30466

摘要： A system and method for detecting a milling endpoint on a semiconductor sample by directing an ion beam from a focused ion beam (FIB) apparatus at the sample and using charge pulse detection electronics (CPDE) components to generate a distribution curve on a histogram display. A preferred configuration of the CPDE components includes a charge preamplifier, a pulse amplifier, a pulse shaper, and a multichannel analyzer (MCA).