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公开(公告)号:US20120082828A1
公开(公告)日:2012-04-05
申请号:US12973448
申请日:2010-12-20
申请人: Sun-Ju KU , Jun-Ho CHOI
发明人: Sun-Ju KU , Jun-Ho CHOI
CPC分类号: G03F1/48 , C23C14/0694 , C23C14/10 , Y10T428/24851
摘要: The present invention relates to a laser pattern mask, and a method for fabricating the same, which can prevent a laser pattern mask from being damaged by coating a protective film on a surface of a laser pattern mask for patterning an entire layer on a mother substrate at a time by laser ablation. The laser pattern mask includes a base substrate, a laser shielding pattern formed of a non-transparent metal on the base substrate to define laser pass through regions, and a protective film formed on an entire surface of the base substrate including the laser shielding pattern.
摘要翻译: 激光图案掩模及其制造方法技术领域本发明涉及激光图案掩模及其制造方法,其可以防止在激光图案掩模的表面上涂覆保护膜而损坏激光图案掩模,以在母板上图案化整个层 一次通过激光消融。 激光图案掩模包括基底基板,由基底基板上的不透明金属形成的激光屏蔽图案,以限定激光通过区域,以及形成在包括激光屏蔽图案的基底基板的整个表面上的保护膜。
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公开(公告)号:US08409771B2
公开(公告)日:2013-04-02
申请号:US12973448
申请日:2010-12-20
申请人: Sun-Ju Ku , Jun-Ho Choi
发明人: Sun-Ju Ku , Jun-Ho Choi
IPC分类号: G03F1/22
CPC分类号: G03F1/48 , C23C14/0694 , C23C14/10 , Y10T428/24851
摘要: The present invention relates to a laser pattern mask, and a method for fabricating the same, which can prevent a laser pattern mask from being damaged by coating a protective film on a surface of a laser pattern mask for patterning an entire layer on a mother substrate at a time by laser ablation. The laser pattern mask includes a base substrate, a laser shielding pattern formed of a non-transparent metal on the base substrate to define laser pass through regions, and a protective film formed on an entire surface of the base substrate including the laser shielding pattern.
摘要翻译: 激光图案掩模及其制造方法技术领域本发明涉及激光图案掩模及其制造方法,其可以防止在激光图案掩模的表面上涂覆保护膜而损坏激光图案掩模,以在母板上图案化整个层 一次通过激光消融。 激光图案掩模包括基底基板,由基底基板上的不透明金属形成的激光屏蔽图案以限定激光通过区域,以及形成在包括激光屏蔽图案的基底基板的整个表面上的保护膜。
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