MODELING STRUCTURE FOR SIMULATION OF TRAPEZOIDAL METAL LINE
    1.
    发明申请
    MODELING STRUCTURE FOR SIMULATION OF TRAPEZOIDAL METAL LINE 审中-公开
    用于模拟铁皮金属线的建模结构

    公开(公告)号:US20100169058A1

    公开(公告)日:2010-07-01

    申请号:US12649168

    申请日:2009-12-29

    IPC分类号: G06F17/50

    CPC分类号: G06F17/5036

    摘要: Embodiments relate to a semiconductor technology, and more particularly, to a modeling structure for simulation of a trapezoidal metal line. The modeling structure for simulation of a trapezoidal metal line includes a top step with a width A, a bottom step with a width B, a middle step with a width equal to an average of the width A and the width B, and a total height C, wherein the middle step has a height equal to a value obtainable by subtracting both a height of the top step and a height of the bottom step from the total height C.

    摘要翻译: 实施例涉及半导体技术,更具体地,涉及用于模拟梯形金属线的建模结构。 用于模拟梯形金属线的建模结构包括具有宽度A的顶部台阶,具有宽度B的底部台阶,宽度等于宽度A和宽度B的平均宽度的中间台阶,以及总高度 C,其中中间台阶的高度等于从总高度C减去顶部台阶的高度和底部台阶的高度可获得的值。