Abstract:
An interferometric measuring device for measuring a surface or profile of an object includes a beam generating unit operable to generate a measurement beam with a spectral component at a wavelength smaller than 550 nm, a splitter to branch off an object beam and a reference beam from the measurement beam, a measurement probe connected to the beam generating unit and configured to direct the object beam onto the surface and to capture a portion of the object beam reflected from the surface as a signal beam, a signal analyzer connected to a detector unit and operable to derive a distance between the measurement probe and the surface on the basis of signals obtained from first and second detectors operable to detect first and second partial beams from an analysis beam being a recombination of the signal beam and the reference beam.
Abstract:
A device and method for geometrically measuring an object, with a base and a carrier device arranged thereon for the object, at least one reference object which can be fixed relative to the base, at least one distance measuring system, by means of which a distance between the reference object and the surface of the object facing the reference object can be determined, and an object holder having an upper side and a lower side, to which the object can be attached, wherein the object holder can be selectively arranged in a first orientation and a second orientation on the carrier device, wherein the distance measuring system and the object holder are movable relative to each other in order to scan the surface of the object, and the object holder has on the upper side thereof and on the lower side thereof respective reference structures.