公开(公告)号：US06584854B2

公开(公告)日：2003-07-01

申请号：US10175520

申请日：2002-06-19

申请人： Isamu Kimura ,  Masatoshi Oba ,  Takashi Itakura

发明人： Isamu Kimura ,  Masatoshi Oba ,  Takashi Itakura

IPC分类号： G01L900

CPC分类号： A61B5/022 ,  G01L9/0042 ,  G01L9/0073

摘要： A pressure-detecting chamber 23, a pressure-directing path 25 and a buffer space 24 are formed on the upper face of a main-body-side substrate 22 as recessed portions, and the upper face of the pressure-detecting chamber 23 is covered with a thin-type diaphragm 31, and upper faces of the pressure-directing path 25 and the buffer space 24 are covered with a cover substrate 30. A pressure-introducing unit 26 formed on the lower face of the main-body-side substrate 22 is connected to the lower face of the buffer space 24. The cross-section of the buffer space 24 is greater than the cross-section of the pressure-introducing unit 26, and the capacity of the buffer space 24 is greater than the capacity of the pressure-directing path 25. With this arrangement, it is possible to provide a pressure sensor which can control the response characteristic of the pressure sensor to a pressure change with high precision without causing serious adverse effects on the other characteristics of the pressure sensor, without preventing the miniaturization of the sensor.

摘要翻译： 压力检测室23，压力引导路径25和缓冲空间24形成在主体侧基板22的上表面上作为凹部，并且压力检测室23的上表面被覆盖 具有薄型隔膜31，并且压力引导路径25和缓冲空间24的上表面被覆盖基板30覆盖。形成在主体侧基板的下表面上的压力引入单元26 22连接到缓冲空间24的下表面。缓冲空间24的横截面大于压力导入单元26的横截面，缓冲空间24的容量大于容量 通过这种布置，可以提供一种能够以高精度将压力传感器的响应特性控制到压力变化的压力传感器，而不会对压缩机的其他特性造成严重的不利影响 重新传感器，而不会妨碍传感器的小型化。