Calibration method for protrusion detecting head units and protrusion
inspection method and protrusion inspection device using the same
    1.
    发明授权
    Calibration method for protrusion detecting head units and protrusion inspection method and protrusion inspection device using the same 失效
    突起检测头单元的校准方法和突起检查方法以及使用其的突出检查装置

    公开(公告)号:US5557554A

    公开(公告)日:1996-09-17

    申请号:US222948

    申请日:1994-04-05

    摘要: A calibration method for protrusion detection head units including steps of selecting as a master head unit a protrusion detection head unit of which lifting characteristic is known, further selecting one of any protrusion detection head units which is used for protrusion inspection as a measurement head unit, determining a disk having a predetermined surface roughness as a reference disk, successively loading the head of the master head unit and the head of the measurement head unit on the face of the reference disk which is rotated and causing to lift the same, measuring output voltages em of the master head unit and output voltages es of the measurement head unit while varying the circumferential speed of the track on the reference disk to determine as a function respective output voltage characteristics using the circumferential speed and linear-approximating the respective output voltage characteristics on a rectangular coordinate system of output voltage-circumferential speed to determine linear equations of em=-av+b and es=-a'v+b', wherein a and a' are inclinations and b and b' are intercepts on the output voltage axis of the linear equations.

    摘要翻译: 一种用于突起检测头单元的校准方法,包括以下步骤:选择具有已知提升特性的突出检测头单元作为主头单元,进一步选择用于突出检查的任何突起检测头单元中的一个作为测量头单元, 确定具有预定表面粗糙度的盘作为参考盘,将主头单元的头部和测量头单元的头连续地装载在旋转并使其提升的基准盘的面上,测量输出电压 em,并且改变测量头单元的输出电压es,同时改变参考盘上的轨道的圆周速度,以使用圆周速度确定作为各自的输出电压特性的函数,并对其各自的输出电压特性进行线性近似 输出电压 - 圆周速度的直角坐标系 确定em = -av + b和es = -a'v + b'的线性方程,其中a和a'是倾斜度,b和b'是线性方程的输出电压轴上的截距。

    Protrusion sensor for sensing protrusion on a disc
    2.
    发明授权
    Protrusion sensor for sensing protrusion on a disc 失效
    用于感测盘上突起的突起传感器

    公开(公告)号:US5488857A

    公开(公告)日:1996-02-06

    申请号:US350034

    申请日:1994-11-29

    IPC分类号: G01N29/14 G01B17/08

    CPC分类号: G01N29/14

    摘要: A protrusion sensor according to the present invention comprises a protrusion sensing head, a suspension spring having a front end portion fixedly mounting the protrusion sensing head and a rear end portion fixedly secured to one surface of a support arm, a carriage for supporting the support arm and a vibration sensor of piezo-electric ceramics fixedly mounted on the other surface of the support arm. A protrusion is detected by the collision of the protrusion sensing head flying by air flow on a surface of a rotary disc caused by rotation thereof with a protrusion.

    摘要翻译: 根据本发明的突起传感器包括突起感测头,悬架弹簧,其具有固定地安装突起感测头的前端部分和固定地固定在支撑臂的一个表面上的后端部分,用于支撑支撑臂 以及固定地安装在支撑臂的另一个表面上的压电陶瓷的振动传感器。 通过由旋转盘的表面由突出部旋转引起的旋转盘的表面上的气流的突出感测头的碰撞来检测突起。