Microfluidic cooling of integrated circuits
    2.
    发明授权
    Microfluidic cooling of integrated circuits 有权
    集成电路的微流体冷却

    公开(公告)号:US07652372B2

    公开(公告)日:2010-01-26

    申请号:US11103216

    申请日:2005-04-11

    IPC分类号: H01L23/34 H01L23/10

    摘要: A microchannel cooling system used to cool integrated circuits may include a number of microchannels which may be subject to bubble blockage. When bubble formation or nucleation occurs due to heating, the bubbles may become trapped within the microchannels. A valve within the microchannel may automatically operate, at least partially, to close off the microchannel, allowing the bubble to be freed and to be flushed from the channel in some embodiments.

    摘要翻译: 用于冷却集成电路的微通道冷却系统可以包括可能遭受气泡阻塞的多个微通道。 当由于加热而发生气泡形成或成核时,气泡可能被捕获在微通道内。 在一些实施例中,微通道内的阀可以自动地至少部分地操作以关闭微通道,从而允许气泡被释放并从通道冲洗。