公开(公告)号：US06730276B2

公开(公告)日：2004-05-04

申请号：US09909075

申请日：2001-07-18

申请人： Mamoru Kosakai ,  Kazunori Ishimura ,  Teruyasu Fujita

发明人： Mamoru Kosakai ,  Kazunori Ishimura ,  Teruyasu Fujita

IPC分类号： B01J1908

CPC分类号： B29C59/106 ,  B29K2105/256 ,  H02N13/00

摘要： The plastic film electrostatic adsorption apparatus of the present invention comprises an electrostatic adsorption electrode, an insulated dielectric layer that covers the electrostatic adsorption electrode and has a center line average roughness of an adsorption surface on which a plastic film is placed of 0.5 micrometers or less, and a power supply electrode that applies a voltage to the electrostatic adsorption electrode. According to this plastic film electrostatic adsorption apparatus, surface treatment can be performed even in a vacuum without requiring tedious work such as application or removal of adhesive. In addition, even if the plastic film expands and deforms due to heat treatment and plasma treatment performed during surface treatment, there is no occurrence of wrinkling, deformation or separation in the plastic film due to the difference in thermal expansion between the electrostatic adsorption surface and plastic film.

摘要翻译： 本发明的塑料膜静电吸附装置包括静电吸附电极，覆盖静电吸附电极的绝缘电介质层，其中放置塑料膜的吸附面的中心线平均粗糙度为0.5微米以下， 以及向静电吸附电极施加电压的电源电极。 根据该塑料膜静电吸附装置，即使在真空中也可以进行表面处理，而不需要繁琐的工作，例如施加或去除粘合剂。 此外，即使由于表面处理中进行的热处理和等离子体处理而导致的塑料膜膨胀变形，也不会由于静电吸附面和静电吸附面之间的热膨胀差异而导致塑料膜起皱，变形或分离 塑料薄膜。