公开(公告)号：US20120039767A1

公开(公告)日：2012-02-16

申请号：US13180579

申请日：2011-07-12

申请人： Kimio YOSHIMURA ,  Teruyuki HAKODA ,  Shunya YAMAMOTO ,  Atsumi MIYASHITA ,  Masaki SUGIMOTO ,  Masahito YOSHIKAWA

发明人： Kimio YOSHIMURA ,  Teruyuki HAKODA ,  Shunya YAMAMOTO ,  Atsumi MIYASHITA ,  Masaki SUGIMOTO ,  Masahito YOSHIKAWA

IPC分类号： G01N33/52

CPC分类号： G01N21/77 ,  G01N21/783 ,  G01N2021/7783 ,  G01N2021/786

摘要： A sensing element for cyclic saturated hydrocarbons, which can optically detect in a short time the volatilized organic hydride at comparatively low sensing element temperature, and a detector which uses the sensing element are disclosed. The sensing element for cyclic saturated hydrocarbons has a transparent substrate made of ceramics such as quartz; a tungsten trioxide thin film having columnar structure on the transparent substrate, and a platinum layer formed to the thickness of 15 nm or less on the surface of the thin film by deposition.

摘要翻译： 公开了一种用于环状饱和烃的感测元件，其可在短时间内以相当低的感测元件温度光学检测挥发的有机氢化物，以及使用该感测元件的检测器。 环状饱和烃的感应元件具有由诸如石英的陶瓷制成的透明基板; 在透明基板上具有柱状结构的三氧化钨薄膜和通过沉积在薄膜的表面上形成厚度为15nm以下的铂层。