公开(公告)号：US4665276A

公开(公告)日：1987-05-12

申请号：US671664

申请日：1984-11-15

申请人： Thomas Elbel ,  Jurgen Muller ,  Friedemann Volklein

发明人： Thomas Elbel ,  Jurgen Muller ,  Friedemann Volklein

IPC分类号： H01L35/32 ,  G01J5/12 ,  H01L35/08 ,  H01L37/00

CPC分类号： H01L35/08 ,  G01J5/12

摘要： This invention concerns a thermoelectric sensor of the air-backed type comprising a thin-film thermopile with a receiving area of approximately 1 mm.sup.2 under a protective atmosphere of atmospheric pressure. To increase the responsivity of such sensors the sensing junctions of at least 25 thermocouples whose legs have comparable coefficients of thermal conductivity are arranged in the receiving area with the legs having an average breadth-to-length ratio of at least 1:20.

摘要翻译： 本发明涉及一种空气背式的热电传感器，其包括在大气压保护气氛下具有大约1mm 2的接收面积的薄膜热电堆。 为了增加这种传感器的响应度，腿部具有相当的导热系数的至少25个热电偶的感测结布置在接收区域中，腿的平均宽度比至少为1:20。