公开(公告)号：US08354642B2

公开(公告)日：2013-01-15

申请号：US12903235

申请日：2010-10-13

申请人： Israel Berger ,  Danny Elad ,  David Goren ,  Thomas Erwin Morf

发明人： Israel Berger ,  Danny Elad ,  David Goren ,  Thomas Erwin Morf

IPC分类号： H01L27/14

CPC分类号： H01L31/09 ,  G01J5/0837 ,  G01J5/20

摘要： A THz radiation detector comprising a plurality of antenna arms separated from a suspended platform by an isolating thermal air gap. The detector functions to concentrate THz radiation energy into the smaller suspended MEMS platform (e.g., membrane) upon which a thermal sensor element is located. The THz photon energy is converted into electrical energy by means of a pixilated antenna using capacitive coupling in order to couple this focused energy across the thermally isolated air gap and onto the suspended membrane on which the thermal sensor is located.

摘要翻译： 一种太赫兹辐射检测器，包括通过隔离热空气间隙与悬浮平台隔开的多个天线臂。 检测器用于将太赫兹辐射能量集中到放置有热传感器元件的较小悬浮MEMS平台（例如膜）上。 通过使用电容耦合的像素化天线将太赫兹光子能量转换成电能，以将该聚焦能量耦合在隔热气隙和热传感器所在的悬浮膜上。