公开(公告)号：US07105358B2

公开(公告)日：2006-09-12

申请号：US10076838

申请日：2002-02-13

申请人： Arunaya Majumdar ,  Thomas Michael Perazzo ,  Minyao Mao ,  Ohmyoung Kwon ,  Yang Zhao ,  Guanghua Wu

发明人： Arunaya Majumdar ,  Thomas Michael Perazzo ,  Minyao Mao ,  Ohmyoung Kwon ,  Yang Zhao ,  Guanghua Wu

IPC分类号： G01N33/543

CPC分类号： G01L5/0047 ,  B82Y30/00 ,  G01L1/24 ,  Y10S436/805 ,  Y10S436/806

摘要： An apparatus to measure micro-forces includes a cantilever palette with a set of cantilever array blocks. Each cantilever array block includes a set of cantilevers, with each cantilever including a set of cantilever fingers surrounded by a frame with frame fingers. The cantilever fingers and the frame fingers form a diffraction grating. Each cantilever array block is configured to be responsive to a predetermined micro-force, such that cantilevers of the cantilever array block deflect in the presence of the predetermined micro-force, which causes the diffraction grating to diffract light and thereby provide a visual indication of the presence of the predetermined micro-force.