公开(公告)号：US5137750A

公开(公告)日：1992-08-11

申请号：US702956

申请日：1991-05-20

申请人： Nurul Amin ,  John Bortins ,  Ying D. Yan ,  Beat G. Keel ,  Nathan Curland ,  Tim Madsen

发明人： Nurul Amin ,  John Bortins ,  Ying D. Yan ,  Beat G. Keel ,  Nathan Curland ,  Tim Madsen

IPC分类号： G11B5/127 ,  G11B5/31

CPC分类号： G11B5/1278 ,  G11B5/3116 ,  G11B5/3163 ,  Y10T29/49044

摘要： A thin film magnetic read/write head is manufactured using Al.sub.2 O.sub.3 dams. The Al.sub.2 O.sub.3 dams are formed using a sacrificial layer which is deposited upon a bottom pole layer. An Al.sub.2 O.sub.3 layer is deposited over the sacrificial layer. When the sacrificial layer is removed, the Al.sub.2 O.sub.3 layer forms dams between which a top pole piece is deposited. The sacrificial layer is removed using lapping and a selected chemical etch; partial lapping or chemical etch followed by chemical etch of the sacrificial layer which lifts-off overlying Al.sub.2 O.sub.3 ; depositing photoresist dams and chemically etching the encapsulation layer and the sacrificial layer; or removal through physical or thermal shock of the Al.sub.2 O.sub.3 layer sputtered at zero bias followed by a selective chemical etch of the sacrificial layer. The thin film magnetic head of the present invention has pole tips which provide an outside pole face contour that is significantly different from a pole tip contour along a gap region. This reduces an undershoot effect in readback pulses in a readback signal. The altered contour can be used on both top and bottom pole tips to eliminate both leading and trailing undershoots. Additionally, in shielded probe heads for vertical recording a gap region contour can be altered to achieve a similar reduction in leading undershoot.

摘要翻译： 使用Al2O3坝制造薄膜磁读/写头。 使用沉积在底极层上的牺牲层来形成Al 2 O 3坝。 在牺牲层上沉积Al 2 O 3层。 当牺牲层被去除时，Al 2 O 3层形成在其上沉积顶极片之间的堤坝。 使用研磨和选择的化学蚀刻去除牺牲层; 部分研磨或化学蚀刻，然后是上覆Al2O3的牺牲层的化学蚀刻; 沉积光刻胶坝并化学蚀刻封装层和牺牲层; 或通过在零偏压下溅射的Al 2 O 3层的物理或热冲击进行去除，随后对牺牲层进行选择性化学蚀刻。 本发明的薄膜磁头具有极尖，其提供与极尖轮廓沿间隙区域显着不同的外极面轮廓。 这可以减少回读信号中的回读脉冲中的下冲作用。 改变的轮廓可以在顶部和底部极尖上使用，以消除前方和后方的下冲。 另外，在用于垂直记录的屏蔽探头中，可以改变间隙区域轮廓以实现引导下冲的类似的减小。

公开(公告)号：US5406434A

公开(公告)日：1995-04-11

申请号：US263009

申请日：1994-06-20

申请人： Nurul Amin ,  John Bortins ,  Ying D. Yan ,  Beat G. Keel ,  Nathan Curland ,  Tim Madsen

发明人： Nurul Amin ,  John Bortins ,  Ying D. Yan ,  Beat G. Keel ,  Nathan Curland ,  Tim Madsen

IPC分类号： G11B5/127 ,  G11B5/31 ,  G11B5/187

CPC分类号： G11B5/1278 ,  G11B5/3116 ,  G11B5/3163 ,  Y10T29/49044

摘要： A thin film magnetic read/write head is manufactured using Al.sub.2 O.sub.3 dams. The Al.sub.2 O.sub.3 dams are formed using a sacrificial layer which is deposited upon a bottom pole layer. An Al.sub.2 O.sub.3 layer is deposited over the sacrificial layer. When the sacrificial layer is removed, the Al.sub.2 O.sub.3 layer forms dams between which a top pole piece is deposited. The sacrificial layer is removed using lapping and a selected chemical etch; etch of the sacrificial layer which lifts-off overlying partial lapping or chemical etch followed by chemical Al.sub.2 O.sub.3 ; depositing photoresist dams and chemically, etching the encapsulation layer and the sacrificial layer; or removal through physical or thermal shock of the Al.sub.2 O.sub.3 layer sputtered at zero bias followed by a selective chemical etch of the sacrificial layer. The thin film magnetic head of the present invention has pole tips which provide an outside pole face contour that is significantly different from a pole tip contour along a gap region. This reduces an undershoot effect in readback pulses in a readback signal. The altered contour can be used on both top and bottom pole tips to eliminate both leading and trailing undershoots. Additionally, in shielded probe heads for vertical recording a gap region contour can be altered to achieve a similar reduction in leading undershoot.

摘要翻译： 使用Al2O3坝制造薄膜磁读/写头。 使用沉积在底极层上的牺牲层来形成Al 2 O 3坝。 在牺牲层上沉积Al 2 O 3层。 当牺牲层被去除时，Al 2 O 3层形成在其上沉积顶极片之间的堤坝。 使用研磨和选择的化学蚀刻去除牺牲层; 牺牲层的蚀刻，其覆盖部分研磨或化学蚀刻，然后是化学Al 2 O 3; 沉积光致抗蚀剂坝并进行化学蚀刻，蚀刻封装层和牺牲层; 或通过在零偏压下溅射的Al 2 O 3层的物理或热冲击进行去除，随后对牺牲层进行选择性化学蚀刻。 本发明的薄膜磁头具有极尖，其提供与极尖轮廓沿间隙区域显着不同的外极面轮廓。 这可以减少回读信号中的回读脉冲中的下冲作用。 改变的轮廓可以在顶部和底部极尖上使用，以消除前方和后方的下冲。 另外，在用于垂直记录的屏蔽探头中，可以改变间隙区域轮廓以实现引导下冲的类似的减小。