公开(公告)号：US20090229019A1

公开(公告)日：2009-09-10

申请号：US11922844

申请日：2006-02-21

Applicant: Ricardo Garcia Garcia ,  Tomas Raul Rodriguez Frutos

Inventor： Ricardo Garcia Garcia ,  Tomas Raul Rodriguez Frutos

IPC: G12B21/08

CPC classification number: G01Q30/04 ,  G01Q60/34

Abstract: The invention relates to a method of using an atomic force microscope and to a microscope. The inventive method comprises the following steps consisting in at least performing bimodal excitation of a microlever (M) which is disposed on a sample and analysing at least: the variation in the oscillation amplitude (Ai) of an output signal (Ai cos(ωit−φi)) that is representative of the response from the microlever (M) to the excitation of one of the natural vibration modes thereof, in order to obtain topographic information in relation to the sample; and to the variation in the phase (φj) of an output signal (Aj cos(ωjt−φj)) that is representative of the response from the microlever (M) to the excitation of another natural vibration mode thereof, in order to obtain compositional information in relation to the sample. The inventive microscope is adapted to be used with the aforementioned method.

Abstract translation: 本发明涉及使用原子力显微镜和显微镜的方法。 本发明的方法包括以下步骤：至少执行放置在样品上的微型显微镜（M）的双模激发，并至少分析：输出信号的振荡幅度（Ai）的变化（Ai cos（ω- phii）），其代表从微型飞机（M）到其自然振动模式之一的激励的响应，以便获得与样本相关的地形信息; 以及代表从微型飞机（M）到其他自然振动模式的激励的响应的输出信号的相位（phij）的变化，以便获得组成 与样本有关的信息。 本发明的显微镜适于与上述方法一起使用。