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    Impurity scavenging system
    2.
    发明授权
    Impurity scavenging system 失效
    杂质清除系统

    公开(公告)号：US5460636A

    公开(公告)日：1995-10-24

    申请号：US159292

    申请日：1993-11-30

    申请人： Hiroyuki Harada ,  Tsutomu Koinuma ,  Terufumi Iwata ,  Michio Nitta

    发明人： Hiroyuki Harada ,  Tsutomu Koinuma ,  Terufumi Iwata ,  Michio Nitta

    IPC分类号： G01N1/22 ,  B01D53/14 ,  B01D53/34 ,  B01D19/00

    CPC分类号： B01D53/34 ,  B01D53/14

    摘要： An impurity scavenging system which scavenges impurities of off-gases discharged from a clean room of a production line for semiconductors. The impurity scavenging system has a gas introduction line through which gas to be processed (hereinafter referred as GSP) is discharged, a scavenging unit which stores scavenging liquid, a condenser for condensing vaporized liquid from the scavenging unit, a first pump which pumps the GSP of a discharging line connected with the downstream side of the condenser, a liquid source, a cleaning liquid line which connects the discharging line to a drain and a first valve having ports, including a first port connected with the condenser, a second port connected with the first pump, and a third port connected with one end of the cleaning line another end of which is connected to the drain, thereby selectively enabling a connection from the condenser to the first pump and a connection from the condenser to the cleaning line.

    摘要翻译： 一种清除半导体生产线洁净室排出的废气杂质的杂质清除系统。 杂质清除系统具有排出待处理气体（以下称为GSP）的气体引入管线，存储清除液的清扫单元，用于从清扫单元冷凝汽化液体的冷凝器，泵送GSP的第一泵 与所述冷凝器的下游侧连接的排出管线，液体源，将排出管路连接到排水管的清洗液体管路和具有端口的第一阀门，所述第一阀门具有与所述冷凝器连接的第一端口， 第一泵和连接到清洁管线的一端的第三端口，其另一端连接到排水口，从而选择性地实现从冷凝器到第一泵的连接以及从冷凝器到清洁管线的连接。