公开(公告)号：US07649980B2

公开(公告)日：2010-01-19

申请号：US11950167

申请日：2007-12-04

申请人： Nobutada Aoki ,  Akiko Kakutani ,  Tsuyoshi Sugawara ,  Motosuke Miyoshi

发明人： Nobutada Aoki ,  Akiko Kakutani ,  Tsuyoshi Sugawara ,  Motosuke Miyoshi

IPC分类号： H01J35/14

CPC分类号： H01J35/08 ,  H01J35/14 ,  H01J2235/087 ,  H01J2235/186

摘要： A transmission target of a vacuum container is operable to have a ground potential and an electro-optical system is floated at a positive potential in the vacuum container. An electron beam, which is converged by means of the electro-optical system, is decelerated immediately before the electron beam is incident to the transmission target. The electron beam has energy that is several times of the final set value until the electron beam passes through the electro-optical system, and a divergence action exerted by a spatial electric charge effect is reduced. Color aberration of the electro-optical system is proportional to energy of the electron beam. Thus, if the electron beam is decelerated after the electron beam has passed through the electro-optical system, aberration is reduced in proportion to the degree of deceleration, making it possible to concurrently reduce a focus size.

摘要翻译： 真空容器的透射目标可操作为具有接地电位，并且电光系统在真空容器中浮动为正电位。 通过电光学系统会聚的电子束在电子束入射到传输目标之前立即减速。 电子束的能量是最终设定值的几倍，直到电子束通过电光系统，并且由空间电荷效应产生的发散作用减小。 电光系统的色差与电子束的能量成比例。 因此，如果在电子束通过电光系统之后电子束减速，则与减速度成比例地减小像差，从而可以同时减小焦点尺寸。

公开(公告)号：US20080304624A1

公开(公告)日：2008-12-11

申请号：US11950167

申请日：2007-12-04

申请人： Nobutada Aoki ,  Akiko Kakutani ,  Tsuyoshi Sugawara ,  Motosuke Miyoshi

发明人： Nobutada Aoki ,  Akiko Kakutani ,  Tsuyoshi Sugawara ,  Motosuke Miyoshi

IPC分类号： H01J35/14

CPC分类号： H01J35/08 ,  H01J35/14 ,  H01J2235/087 ,  H01J2235/186

摘要： A transmission target of a vacuum container is operable to have a ground potential and an electro-optical system is floated at a positive potential in the vacuum container. An electron beam, which is converged by means of the electro-optical system, is decelerated immediately before the electron beam is incident to the transmission target. The electron beam has energy that is several times of the final set value until the electron beam passes through the electro-optical system, and a divergence action exerted by a spatial electric charge effect is reduced. Color aberration of the electro-optical system is proportional to energy of the electron beam. Thus, if the electron beam is decelerated after the electron beam has passed through the electro-optical system, aberration is reduced in proportion to the degree of deceleration, making it possible to concurrently reduce a focus size.

摘要翻译： 真空容器的透射目标可操作为具有接地电位，并且电光系统在真空容器中浮动为正电位。 通过电光学系统会聚的电子束在电子束入射到传输目标之前立即减速。 电子束的能量是最终设定值的几倍，直到电子束通过电光系统，并且由空间电荷效应产生的发散作用减小。 电光系统的色差与电子束的能量成比例。 因此，如果在电子束通过电光系统之后电子束减速，则与减速度成比例地减小像差，从而可以同时减小焦点尺寸。