公开(公告)号：US20070013907A1

公开(公告)日：2007-01-18

申请号：US10570367

申请日：2004-09-03

Applicant: Vladimir Pobortchi ,  Toshihiko Kanayama ,  Tetsuya Tada

Inventor： Vladimir Pobortchi ,  Toshihiko Kanayama ,  Tetsuya Tada

IPC: G01J3/44 ,  G01N21/65

CPC classification number: G01Q60/22 ,  G01N21/658 ,  G01N2021/656

Abstract: An optical measurement of a crystalline sample to be measured. The sample is irradiated with an exciting light from the polarization direction in which the Raman scattering is prohibited by the selection rule. When a metal probe is brought to proximity to the sample to be measured, the selection rule is eased locally only in the proximity portion near the probe end in order that Raman scattering becomes active. Thus, a Raman signal only from the proximity portion near the probe end is detected. An optical measurement apparatus having an optical arrangement for measuring a signal light re-emitted from a sample to be measured when the sample is irradiated with an exciting light is provided. The optical measurement apparatus comprises a means for limiting the polarization state of the exciting light or signal light and a means for bringing a metal probe near the sample to be measured. The optical measurement apparatus is used to measure the signal light obtained by locally easing the limitation on the polarization state by bringing the metal probe near the sample. Therefore, Raman scattering light from silicon or the like can be measured with high space-resolution exceeding the light diffraction limit.

Abstract translation: 要测量的结晶样品的光学测量。 用选择规则禁止拉曼散射的偏振方向的激发光照射样品。 当使金属探针靠近待测样品时，选择规则仅在探针端附近的靠近部分缓和，以使拉曼散射成为活跃状态。 因此，仅从探测端附近的靠近部分检测拉曼信号。 提供一种具有光学装置的光学测量装置，用于当用激发光照射样品时，测量从待测样品重新发射的信号光。 光学测量装置包括用于限制激发光或信号光的偏振状态的装置和用于使金属探针靠近待测样品的装置。 光学测量装置用于通过使金属探针靠近样品来测量通过局部减轻极化状态限制而获得的信号光。 因此，可以以超过光衍射极限的高空间分辨率来测量来自硅等的拉曼散射光。

公开(公告)号：US07408635B2

公开(公告)日：2008-08-05

申请号：US10570367

申请日：2004-09-03

Applicant: Vladimir Pobortchi ,  Toshihiko Kanayama ,  Tetsuya Tada

Inventor： Vladimir Pobortchi ,  Toshihiko Kanayama ,  Tetsuya Tada

IPC: G01J3/44 ,  G01N21/65

CPC classification number: G01Q60/22 ,  G01N21/658 ,  G01N2021/656

Abstract: An optical measurement of a crystalline sample to be measured. The sample is irradiated with an exciting light from the polarization direction in which the Raman scattering is prohibited by the selection rule. When a metal probe is brought to proximity to the sample to be measured, the selection rule is eased locally only in the proximity portion near the probe end in order that Raman scattering becomes active. Thus, a Raman signal only from the proximity portion near the probe end is detected. An optical measurement apparatus having an optical arrangement for measuring a signal light re-emitted from a sample to be measured when the sample is irradiated with an exciting light is provided. The optical measurement apparatus comprises a means for limiting the polarization state of the exciting light or signal light and a means for bringing a metal probe near the sample to be measured. The optical measurement apparatus is used to measure the signal light obtained by locally easing the limitation on the polarization state by bringing the metal probe near the sample. Therefore, Raman scattering light from silicon or the like can be measured with high space-resolution exceeding the light diffraction limit.

Abstract translation: 要测量的结晶样品的光学测量。 用选择规则禁止拉曼散射的偏振方向的激发光照射样品。 当使金属探针靠近待测样品时，选择规则仅在探针端附近的靠近部分缓和，以使拉曼散射成为活跃状态。 因此，仅从探测端附近的靠近部分检测拉曼信号。 提供一种具有光学装置的光学测量装置，用于当用激发光照射样品时，测量从待测样品重新发射的信号光。 光学测量装置包括用于限制激发光或信号光的偏振状态的装置和用于使金属探针靠近待测样品的装置。 光学测量装置用于通过使金属探针靠近样品来测量通过局部减轻极化状态限制而获得的信号光。 因此，可以以超过光衍射极限的高空间分辨率来测量来自硅等的拉曼散射光。