公开(公告)号：US06886442B2

公开(公告)日：2005-05-03

申请号：US10142374

申请日：2002-05-08

申请人： Wan-Yi Wu ,  Ming Fa Tsai

发明人： Wan-Yi Wu ,  Ming Fa Tsai

IPC分类号： B24B7/22 ,  B24B37/34 ,  B26D1/00 ,  B26F1/02 ,  B26F1/44 ,  C23F1/00 ,  H01L21/306

CPC分类号： B24B37/34 ,  B26F1/02 ,  Y10T83/8831 ,  Y10T83/929 ,  Y10T83/9423 ,  Y10T83/943 ,  Y10T83/944

摘要： An apparatus for punching CMP machine backing film. The apparatus comprises a base, a first plate, and a second plate. The base holds the backing-film. The first plate is disposed on the base in a manner such that it moves between a first position and a second position. The first plate abuts the backing-film when it is located at the second position. The second plate, having a plurality of punches, is disposed on the base in a manner such that it moves between a third position and a fourth position. The first plate is located at the first position when the second plate is located at the third position. The first plate is located at the second position when the second plate is located at the fourth position so that the punches pass through the first plate to punch the backing-film.

摘要翻译： 一种用于冲压CMP机背衬膜的设备。 该装置包括基座，第一板和第二板。 底座上有背胶。 第一板以使其在第一位置和第二位置之间移动的方式设置在基座上。 当第一板位于第二位置时，第一板邻接背胶膜。 具有多个冲头的第二板以使其在第三位置和第四位置之间移动的方式设置在基座上。 当第二板位于第三位置时，第一板位于第一位置。 当第二板位于第四位置时，第一板位于第二位置，使得冲头穿过第一板以冲压背衬膜。