Method and System for Measuring Sub-Surface Composition of a Sample
    1.
    发明申请
    Method and System for Measuring Sub-Surface Composition of a Sample 有权
    测量样品表面组成的方法和系统

    公开(公告)号:US20090219523A1

    公开(公告)日:2009-09-03

    申请号:US12066915

    申请日:2006-02-23

    IPC分类号: G01J3/00

    摘要: In a method for measuring a composition of a sample, an illumination surface area of the sample is illuminated using a light source, and light from a plurality of emitting surface areas of the sample is received, each emitting surface area at a different location, the received light scattered by the sample. A cumulative area of the illumination surface area is greater than a cumulative area of two emitting surface areas of the plurality of emitting surface areas. For each emitting surface area, spectral content information associated with received light corresponding to that emitting surface area is determined, and composition information corresponding to a sub-surface region of the sample is determined based on the determined spectral content information. Different shapes of illumination surface areas as well as the plurality of emitting surface areas may advantageously be utilized for various specimen or sample geometries or illumination sources.

    摘要翻译: 在用于测量样品的组成的方法中,使用光源照射样品的照明表面积,并且接收来自样品的多个发射表面区域的光,每个发射表面积在不同的位置, 收到样品散射的光。 照明表面积的累积面积大于多个发光面积的两个发光面积的累积面积。 对于每个发射表面积,确定与与该发射表面积对应的接收光相关联的光谱内容信息,并且基于所确定的光谱内容信息来确定与样本的子表面区域相对应的合成信息。 不同形状的照明表面区域以及多个发射表面区域可有利地用于各种样品或样品几何形状或照明源。

    Method and system for measuring sub-surface composition of a sample
    2.
    发明授权
    Method and system for measuring sub-surface composition of a sample 有权
    测量样品表面组成的方法和系统

    公开(公告)号:US08054463B2

    公开(公告)日:2011-11-08

    申请号:US12066915

    申请日:2006-02-23

    IPC分类号: G01N21/47 G01N21/65

    摘要: In a method for measuring a composition of a sample, an illumination surface area of the sample is illuminated using a light source, and light from a plurality of emitting surface areas of the sample is received, each emitting surface area at a different location, the received light scattered by the sample. A cumulative area of the illumination surface area is greater than a cumulative area of two emitting surface areas of the plurality of emitting surface areas. For each emitting surface area, spectral content information associated with received light corresponding to that emitting surface area is determined, and composition information corresponding to a sub-surface region of the sample is determined based on the determined spectral content information. Different shapes of illumination surface areas as well as the plurality of emitting surface areas may advantageously be utilized for various specimen or sample geometries or illumination sources.

    摘要翻译: 在用于测量样品的组成的方法中,使用光源照射样品的照明表面积,并且接收来自样品的多个发射表面区域的光,每个发射表面积在不同的位置, 收到样品散射的光。 照明表面积的累积面积大于多个发光面积的两个发光面积的累积面积。 对于每个发射表面积,确定与与该发射表面积对应的接收光相关联的光谱内容信息,并且基于所确定的光谱内容信息来确定与样本的子表面区域相对应的合成信息。 不同形状的照明表面区域以及多个发射表面区域可有利地用于各种样品或样品几何形状或照明源。