公开(公告)号：US20200150055A1

公开(公告)日：2020-05-14

申请号：US16676779

申请日：2019-11-07

申请人： Haiyang Quan ,  Fuchao Xu ,  Taotao Fu ,  Xiaochuan Hu ,  Gaofeng Wu ,  Xi Hou ,  Fan Wu ,  Sheng Li

发明人： Haiyang Quan ,  Fuchao Xu ,  Taotao Fu ,  Xiaochuan Hu ,  Gaofeng Wu ,  Xi Hou ,  Fan Wu ,  Sheng Li

IPC分类号： G01N21/95 ,  G01N21/94 ,  G01N21/956 ,  G01N21/88 ,  G06T7/00 ,  H01L21/66 ,  G06K7/10

摘要： Embodiments of the present disclosure relate to a measuring method and device for measuring surface defects of a cambered optical element, which belongs to the field of photoelectric detection technology. The device includes a sensor measuring head, a rotatable workpiece table, an automatic sampling device, and a spraying device. The sensor measuring head includes an illumination sub-system and a line scan imaging sub-system, the illumination sub-system provides an illumination of high uniformity and high brightness for a surface of a sample to be detected, the rotatable workpiece table and the imaging sub-system are configured for performing a ring belt scanning and a high resolution scatter imaging to the defects on an optical surface region. The automatic sampling device is used as a mechanical arm in an automatic production for automatically clamping optical elements; the spraying device is activated once foreign matters such as dust and impurities are detected on the surface, so as to accurately remove false defects such as dust and impurities on the surface of the piece to be detected. Embodiments of the present disclosure effectively solve the problem that the surface defect detection of the large caliber optical element is difficult and the efficiency thereof is low, and can quickly measure surface defects of a large caliber planar, spherical and cambered optical element.