ESD protection scheme for semiconductor devices having dummy pads

    公开(公告)号:US20080174923A1

    公开(公告)日:2008-07-24

    申请号:US11812221

    申请日:2007-06-15

    IPC分类号: H02H9/00 H01L21/336

    CPC分类号: H01L27/0255

    摘要: A semiconductor device formed in a semiconductor substrate for dissipating electrostatic discharge and/or accumulated charge in an integrated circuit is provided. In one embodiment, the device comprises a semiconductor substrate; a plurality of layers of metal lines formed overlying the substrate; a plurality of via plugs through intermetal dielectric layers between the layers of metal lines and wherein the via plugs interconnect the metal lines; and a dummy pad formed over the plurality of layers of metal lines, the dummy pad having a diode connected thereto and to ground for providing a discharge path for the electrostatic discharge and/or accumulated charge.