公开(公告)号：US20090244516A1

公开(公告)日：2009-10-01

申请号：US12309166

申请日：2007-07-09

申请人： Manjusha Mehendale ,  Michael J. Kotelyanskii ,  Yanwen Hou ,  Jim Onderko ,  Guray Tas

发明人： Manjusha Mehendale ,  Michael J. Kotelyanskii ,  Yanwen Hou ,  Jim Onderko ,  Guray Tas

IPC分类号： G01B11/16

CPC分类号： G01N21/211 ,  G01N21/636 ,  G01N21/8422 ,  G01N21/9501 ,  G01N21/956

摘要： A method includes selecting one of performing ellipsometry or performing optical stress generation and detection. The method also includes, in response to selecting performing ellipsometry, applying at least one first control signal to a controllable retarder that modifies at least polarization of a light beam, and performing ellipsometry using the modified light beam. The method further includes, in response to selecting performing optical stress generation and detection, applying at least one second control signal to the controllable retarder, and performing optical stress generation and detection using the modified light beam. Apparatus and computer readable media are also disclosed.

摘要翻译： 一种方法包括选择执行椭偏仪或执行光学应力产生和检测之一。 该方法还包括响应于选择执行椭偏仪，将至少一个第一控制信号施加到至少修改光束的偏振的可控延迟器，以及使用修改的光束执行椭偏仪。 该方法还包括响应于选择执行光应力产生和检测，向可控延迟器施加至少一个第二控制信号，并且使用修改的光束进行光应力产生和检测。 还公开了装置和计算机可读介质。

公开(公告)号：US07903238B2

公开(公告)日：2011-03-08

申请号：US12309166

申请日：2007-07-09

申请人： Manjusha Mehendale ,  Michael J. Kotelyanskii ,  Yanwen Hou ,  Jim Onderko ,  Guray Tas

发明人： Manjusha Mehendale ,  Michael J. Kotelyanskii ,  Yanwen Hou ,  Jim Onderko ,  Guray Tas

IPC分类号： G01B11/16 ,  G01J4/00

CPC分类号： G01N21/211 ,  G01N21/636 ,  G01N21/8422 ,  G01N21/9501 ,  G01N21/956

摘要： A method includes selecting one of performing ellipsometry or performing optical stress generation and detection. The method also includes, in response to selecting performing ellipsometry, applying at least one first control signal to a controllable retarder that modifies at least polarization of a light beam, and performing ellipsometry using the modified light beam. The method further includes, in response to selecting performing optical stress generation and detection, applying at least one second control signal to the controllable retarder, and performing optical stress generation and detection using the modified light beam. Apparatus and computer readable media are also disclosed.

摘要翻译： 一种方法包括选择执行椭偏仪或执行光学应力产生和检测之一。 该方法还包括响应于选择执行椭偏仪，将至少一个第一控制信号施加到至少修改光束的偏振的可控延迟器，以及使用修改的光束执行椭偏仪。 该方法还包括响应于选择执行光应力产生和检测，向可控延迟器施加至少一个第二控制信号，并且使用修改的光束进行光应力产生和检测。 还公开了装置和计算机可读介质。