Method of forming electrode for plasma display panel
    1.
    发明申请
    Method of forming electrode for plasma display panel 审中-公开
    等离子显示面板电极形成方法

    公开(公告)号:US20060097257A1

    公开(公告)日:2006-05-11

    申请号:US11262935

    申请日:2005-11-01

    IPC分类号: H01L29/04

    CPC分类号: H01J9/14 H01J9/02

    摘要: A method of forming an electrode for a plasma display panel, in which the method includes the steps of forming a first metal film on a second metal film after formation of the second metal film on a substrate, forming a resist pattern on the laminated metal films, and etching the laminated metal films with an etching solution, thereby forming an electrode of the laminated films. A first metal is different from a second metal, and the first metal and the second metal have properties such that the surface potential of the first metal decreases when the first metal and the second metal in the state of being soaked in an etching solution of the first metal are short-circuited. During or after the formation of the first metal film, a diffusion step is performed in which an atmospheric temperature is kept at such a temperature that the metal atoms of the second metal film diffuse in and on the surface of the first metal film.

    摘要翻译: 一种形成等离子体显示面板用电极的方法,其特征在于,在基板上形成第二金属膜后,在第二金属膜上形成第一金属膜,在层叠金属膜上形成抗蚀剂图案 ,并用蚀刻溶液蚀刻层叠的金属膜,从而形成层叠膜的电极。 第一金属与第二金属不同,并且第一金属和第二金属具有这样的性质,使得当第一金属和第二金属在浸渍在第二金属的蚀刻溶液中的状态下时,第一金属的表面电位降低 第一金属短路。 在第一金属膜形成期间或之后,进行扩散步骤,其中将气氛温度保持在第二金属膜的金属原子扩散到第一金属膜的表面上的温度。