摘要:
A method of feeding a coating liquid into a path from a tank to a coating apparatus through a filter and a degassing apparatus by a pump, comprising the steps of preparing a cleaning liquid containing degassed warm water in advance and aqueous solution of low surface tension; pouring the cleaning liquid into the path through the filter by the pump to dissolve bubbles contained in the filter into the cleaning liquid; exhausting the cleaning liquid from the path; filling the path as far as the coating apparatus with the new cleaning liquid anew; and substituting a coating liquid for the cleaning liquid sequentially.