公开(公告)号：US4816046A

公开(公告)日：1989-03-28

申请号：US182490

申请日：1988-04-18

申请人： Yoshiyasu Maeba ,  Satoru Toyoda ,  Humio Naruse

发明人： Yoshiyasu Maeba ,  Satoru Toyoda ,  Humio Naruse

IPC分类号： B01D49/02 ,  B01D47/00 ,  C23C14/56 ,  C23C16/44 ,  F04B37/16 ,  B01D53/22

CPC分类号： C23C16/4412 ,  B01D47/00 ,  C23C14/564

摘要： A particle collector trap for a vacuum evacuating system wherein there is provided a vessel formed of a double-wall cylinder and having an inlet conduit connected to a vacuum processing chamber and an outlet conduit connected to at least one vacuum pump, a passage for flowing gas is defined between the double walls of the vessel, and one of the double walls is heated and other wall is cooled so as to maintain a predetermined temperature difference therebetween.