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公开(公告)号:US4459284A
公开(公告)日:1984-07-10
申请号:US271923
申请日:1981-06-09
摘要: Permanent waving composition containing thioglycolic acid or a salt thereof, and an acidic and/or neutral amino acid.
摘要翻译: 含有巯基乙酸或其盐以及酸性和/或中性氨基酸的永久挥发组合物。
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公开(公告)号:US5096477A
公开(公告)日:1992-03-17
申请号:US555647
申请日:1990-07-23
CPC分类号: F24F3/161
摘要: A clean air room for a semiconductor factory includes a plurality of clean air boxes placed in side-by-side relation and each designed for its own processing step, an air conditioning equipment including a fresh-air regulator for controlling a supply of fresh-air to the clean air boxes, and fan filter units for supplying the air under pressure, the clean air boxes having clean air chambers of which environment is maintained to a predetermined degree of cleanliness in response to the fan filter units and defining an air circulating path extending through the clean air chambers, the clean air chambers including low clean air chambers and an ultra clean air chamber divided by common side walls of the clean air boxes, the low clean air chambers having operating zones and the ultra clean air chamber having a transfer robot therein, and semiconductor processors extending through the common side walls and having processing stations, the processing stations being located at least within the ultra clean air chamber. The ultra clean air chamber includes partitions between which the transfer robot is movable, and the partitions and the common side walls cooperate to form small chambers, the partitions having openings through which an arm of the robot is moved into and out of the small chambers.
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