Mass flow controller automation method and related system
    1.
    发明授权
    Mass flow controller automation method and related system 失效
    质量流量控制器自动化方法及相关系统

    公开(公告)号:US06439254B1

    公开(公告)日:2002-08-27

    申请号:US09727653

    申请日:2000-11-30

    IPC分类号: F16K3102

    摘要: An MFC controlling device automation method and related system. The method mainly comprises the steps of automatically controlled algorithmic obtaining of MFC open loop system parameters by an identification technique; automatically controlled algorithmic determining of PI control parameters by a dominant pole-placement method; and automatically controlled calculating of a fuzzy logic rule table. The steps form an automatically controlled single closed loop. By performing said steps, multiple PI control parameter sets are obtainable fast and in an automatic way, and a calculation is done to form a refined fuzzy rule data table, so that a greatly enhanced MFC reaction function is attained.

    摘要翻译: 一种MFC控制装置自动化方法及相关系统。 该方法主要包括以下步骤:通过识别技术自动控制MFC开环系统参数的获取; 通过主导极位置法自动控制PI控制参数的算法确定; 并自动控制模糊逻辑规则表的计算。 步骤形成一个自动控制的单闭环。 通过执行所述步骤,可以快速且自动地获得多个PI控制参数集,并进行计算以形成精确的模糊规则数据表,从而获得大大增强的MFC反应功能。