公开(公告)号：US06653628B2

公开(公告)日：2003-11-25

申请号：US09960963

申请日：2001-09-25

申请人： Jae-cheol Lee ,  Yury N. Yuryev ,  Chang-bin Lim

发明人： Jae-cheol Lee ,  Yury N. Yuryev ,  Chang-bin Lim

IPC分类号： H01J4000

CPC分类号： G01N23/227

摘要： An electron spectroscopic analyzer using X-rays is provided. The electron spectroscopic analyzer includes an X-ray generator for generating X-rays, an optical system for detecting charged particles emitted from an object irradiated with the X-rays to analyze the object, a vacuum system whose inside is maintained at a low pressure near to vacuum pressure, the vacuum system being provided between the X-ray generator and the optical system, and a blocking unit provided between the X-ray generator and the optical system for preventing elements other than the X-rays emitted from the X-ray generator from flowing into the optical system.

摘要翻译： 提供了使用X射线的电子光谱分析仪。 电子分光分析装置包括：X射线发生器，用于检测从X射线照射的物体发射的带电粒子的光学系统，以分析物体;内部保持在低压附近的真空系统 提供在X射线发生器和光学系统之间的真空系统，以及设置在X射线发生器和光学系统之间的阻挡单元，用于防止除了从X射线发射的X射线以外的元件 发电机流入光学系统。