公开(公告)号：US20140000310A1

公开(公告)日：2014-01-02

申请号：US13884708

申请日：2011-11-08

Applicant: Alan T. Cheng ,  De-Cheng Xie Xie ,  Zhijie Sun

Inventor： Alan T. Cheng ,  De-Cheng Xie Xie ,  Zhijie Sun

IPC: F25J3/06

CPC classification number: F25J3/06 ,  C01B33/02 ,  H02K21/38

Abstract: A system and method for improved cryogenic cooling of process gases is provided. The disclosed system and method provides for the cryogenic cooling of a silane and hydrogen gas process stream during the manufacture of polysilicon with concurrent recovery of refrigeration capacity from the vaporized nitrogen as well as the recovery of refrigeration capacity from the cold hydrogen gas stream. The improved cryogenic cooling system and method reduces the overall consumption of liquid nitrogen without sacrificing cooling performance of the cryogenic cooling of the silane and hydrogen gas process stream.

Abstract translation: 提供了一种用于改善工艺气体的低温冷却的系统和方法。 所公开的系统和方法提供了在制造多晶硅期间硅烷和氢气工艺流的低温冷却，同时从蒸发的氮气中回收制冷量，以及从冷氢气流中回收制冷量。 改进的低温冷却系统和方法降低了液氮的总体消耗，而不牺牲硅烷和氢气工艺流的低温冷却的冷却性能。

公开(公告)号：US20140007615A1

公开(公告)日：2014-01-09

申请号：US13884647

申请日：2011-11-08

Applicant: Alan T. Cheng ,  De-Cheng Xie ,  Zhijie Sun

Inventor： Alan T. Cheng ,  De-Cheng Xie ,  Zhijie Sun

IPC: F25J3/00

CPC classification number: F25J3/00 ,  C01B33/035 ,  H02K21/38

Abstract: A system and method for improved cryogenic cooling of process streams in polysilicon manufacturing is provided. The disclosed system and method provides for the cryogenic cooling of a silane and hydrogen process stream during the manufacture of polysilicon with concurrent recovery of refrigeration capacity from the vaporized nitrogen as well as the recovery of refrigeration capacity from the cold hydrogen stream. The improved cryogenic cooling system and method reduces the overall consumption of liquid nitrogen without sacrificing cooling performance of the cryogenic cooling of the silane and hydrogen process stream.

Abstract translation: 提供了一种用于改善多晶硅制造中工艺流的低温冷却的系统和方法。 所公开的系统和方法提供了在制造多晶硅期间硅烷和氢工艺流的低温冷却，同时从蒸发的氮回收制冷能力以及从冷氢流回收制冷能力。 改进的低温冷却系统和方法降低了液氮的总体消耗，而不牺牲硅烷和氢气工艺流的低温冷却的冷却性能。