Sensor device having an integrated beam splitter

    公开(公告)号:US11047885B2

    公开(公告)日:2021-06-29

    申请号:US16253755

    申请日:2019-01-22

    Abstract: The optical interferometric sensor device comprises an integrated beam splitter having a first facet and a second facet with optical ports arranged therein. On the beam splitter, the beam splitting junctions as well as the optoelectronics-side ports and the sensing-side port are arranged with a mutual displacement along the direction of the first facet. This displacement reduces undesired interference effects caused by stray light. Also, a quarter-wave retarder is provided in a recess of the beam splitter with layers of soft adhesive adjacent to it in order to reduce stress.

    Interferometric sensor
    3.
    发明授权

    公开(公告)号:US10725073B2

    公开(公告)日:2020-07-28

    申请号:US15243713

    申请日:2016-08-22

    Abstract: An interferometric sensor and related methods are provided, with a sensing element whereby a measurand induces a relative phase shift between two waves, at least one detector measuring an interference signal between the two waves, and further including a phase shift detection unit having as input the interference signal and determining a first measure representative of the principal value of the relative phase shift, and a contrast detection unit having as input the interference signal for determining a second measure representative of the cross-correlation between the two waves, and a further a processing unit for converting the first and second measures to a measurand value.

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