公开(公告)号：US11287297B2

公开(公告)日：2022-03-29

申请号：US16637706

申请日：2018-08-08

Applicant: ADVANCE DENKI KOGYO KABUSHIKI KAISHA

Inventor： Kazuhiro Yoshikawa ,  Makio Asano ,  Hitomi Hashimoto ,  Takuya Tsuzuki ,  Kimihito Sasao

IPC: G01F1/42 ,  G01F15/00

Abstract: A liquid micrometer which includes: a liquid flow path which supplies liquid from a liquid supply device to a discharge nozzle; a flow rate sensor provided in the liquid flow path; a control valve provided in the liquid flow path between the liquid supply device and the flow rate sensor; a controller which controls the control valve such that a flow rate measured by the flow rate sensor becomes equal to a set value; a pressure sensor which measures pressure of the liquid injected from the discharge nozzle; and a calculating section which calculates the size of a work from the pressure measured by the pressure sensor in a state where the flow rate is maintained at the set value by the controller.