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公开(公告)号：US20250001732A1
公开(公告)日：2025-01-02
申请号：US18882868
申请日：2024-09-12
Applicant: AGC Inc.
Inventor： Hiroshi WATANABE , Yoji YASUI
Abstract: The present invention relates to a composite substrate for graphene film production, the composite substrate including: a substrate having a thermal expansion coefficient of 2.0×10−6 (K−1) or less; an oxide film; and a metal film containing Cu or Ni, in this order, in which a prescribed diffraction peak is observed by XRD measurement for the metal film by a θ-2θ method, and in a chart obtained by the XRD measurement, a diffraction peak derived other than the prescribed diffraction peak is not observed, or an intensity of diffraction peak other than the prescribed diffraction peak is 1/10 or less of an intensity of the prescribed diffraction peak.
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