公开(公告)号：US10214619B2

公开(公告)日：2019-02-26

申请号：US15176408

申请日：2016-06-08

Applicant: AGC Inc.

Inventor： Norihide Sugiyama ,  Ryujiro Yamasaki ,  Susumu Saito ,  Akihiko Asakawa ,  Masahiro Ohkura ,  Shinji Wada

IPC: C08J3/24 ,  C08F214/18 ,  C08J3/28 ,  H01L33/56

Abstract: To provide a process for producing a fluorinated crosslinked product which is excellent in stability and produces less HF.A process for producing a fluorinated crosslinked product, which comprises irradiating a fluorinated polymer having a unit represented by the following formula (1), with active energy rays having a wavelength of from 150 to 300 nm: wherein X1 and X2 are each independently a hydrogen atom or a fluorine atom, Rf1 is a fluoroalkylene group or a fluoroalkylene group having at least two carbon atoms and an etheric oxygen atom between carbon-carbon atoms, Q1 is a single bond or an etheric oxygen atom, and Z1 is OH, OR1 or NR2R3, wherein R1 is an alkyl group, and R2 and R3 are each independently a hydrogen atom or an alkyl group.