公开(公告)号：US20190267317A1

公开(公告)日：2019-08-29

申请号：US16409178

申请日：2019-05-10

Applicant: AGC Inc.

Inventor： Kohei HORIUCHI ,  Yoichiro SATO

IPC: H01L23/498 ,  H01L23/48 ,  H01L23/528 ,  H01L21/768 ,  H01L23/15 ,  H01L21/48

Abstract: A substrate has a non-through hole. The non-through hole has an opening with a diameter ϕ1 falling within a range of 5 to 200 μm, and a depth d of 30 μm or more. The non-through hole has a rounded end portion, and in a cross section of the non-through hole including a stretching axis of the non-through hole, a shape of the end portion is approximated by a circular arc with a diameter ϕ2, and a ratio of the diameters ϕ2/ϕ1 falls within a range of 0.03 to 0.9. The cross section includes first and second wall lines defining side walls. A tapered angle fouled by a line L and the stretching axis falls within a range of 2° to 80°, the line L passing through a point on the first wall line separated from the opening by a distance 0.1×d and a point by a distance 0.5×d.