公开(公告)号：US20240327273A1

公开(公告)日：2024-10-03

申请号：US18741972

申请日：2024-06-13

Applicant: AGC Inc.

Inventor： Kohei SANO ,  Yoshitaka ONO ,  Yasuo HAYASHI ,  Yutaka IMAMURA

IPC: C03C17/02 ,  C03C15/00

CPC classification number: C03C17/02 ,  C03C15/00 ,  C03C2217/213 ,  C03C2218/152 ,  C03C2218/31

Abstract: A method of manufacturing a member having a recessed structure, including: (1) setting a catalyst material on a portion of a first surface of a process target, wherein the first surface is made of an element that forms a fluoride having a boiling point of 550° C. or less, and the catalyst material contains an organic compound containing a polar functional group; and (2) exposing the process target to a fluorine-containing gas at 80° C. or higher, wherein through the (2), the recessed structure is formed in the first surface under the catalyst material.