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公开(公告)号：US3411084A
公开(公告)日：1968-11-12
申请号：US28767863
申请日：1963-06-13
Applicant: AGENCY IND SCIENCE TECHN
Inventor： SHOEI KATAOKA , HIROYUKI FUJISADA
IPC: G01R21/09
CPC classification number: G01R21/09
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