公开(公告)号：US20160219687A1

公开(公告)日：2016-07-28

申请号：US15025842

申请日：2014-10-01

Applicant: AJOU UNIVERSITY INDUSTRY-ACADEMIC COOPERATION FOUNDATION

Inventor： Sang Sik YANG ,  Kang Il KIM ,  Chang Min LEE

IPC: H05H1/24 ,  H01J37/32

CPC classification number: H05H1/24 ,  H01J37/32467 ,  H01J37/32532 ,  H05H1/2406 ,  H05H2001/2412 ,  H05H2001/2437

Abstract: A microplasma jet device, according to the present invention, comprises: a channel layer having a plurality of micro flow channels arranged in parallel so as to enable a gas for generating plasma to pass therethrough; a first insulating layer joined to one surface of the channel layer and having a first plasma generation electrode; and a second insulating layer joined to the other surface of the channel layer and having a second plasma generation electrode.

Abstract translation: 根据本发明的微流体喷射装置包括：具有平行布置的多个微流通道的通道层，以便能够产生等离子体通过的气体; 连接到所述沟道层的一个表面并具有第一等离子体产生电极的第一绝缘层; 以及与所述沟道层的另一表面接合并具有第二等离子体产生电极的第二绝缘层。