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公开(公告)号：US3130343A
公开(公告)日：1964-04-21
申请号：US3490460
申请日：1960-06-09
Applicant: ALLOYD ELECTRONICS CORP
Inventor： THOMSON DONALD S
IPC: C23C14/30 , H01J37/305
CPC classification number: H01J37/3053 , C23C14/30
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