公开(公告)号：US11156453B2

公开(公告)日：2021-10-26

申请号：US16907105

申请日：2020-06-19

Applicant: AMO DEVELOPMENT, LLC

Inventor： Zheng Sun ,  Daniel Bray ,  Zenon Witowski ,  Timothy Slotterback ,  Hong Fu

IPC: G01B11/24

Abstract: A measurement apparatus for measuring a laser focus spot size, which includes a two-dimensional image detector and an imaging system which forms a magnified image of a focus spot located an object plane onto the image detector. The imaging system includes at least an objective lens. A sealed liquid container is secured over a part of the objective lens such as the optical surface of the objective lens is immersed in the liquid (e.g. water) within the container. The liquid container has a window through which the laser beam enters. An image processing method is also disclosed which processes the image obtained by the image detector to obtain the focus spot size while implementing an algorithm that corrects for the effect of ambient vibration.

公开(公告)号：US20200318952A1

公开(公告)日：2020-10-08

申请号：US16907105

申请日：2020-06-19

Applicant: AMO DEVELOPMENT, LLC

Inventor： Zheng Sun ,  Daniel Bray ,  Zenon Witowski ,  Timothy Slotterback ,  Hong Fu

IPC: G01B11/24

Abstract: A measurement apparatus for measuring a laser focus spot size, which includes a two-dimensional image detector and an imaging system which forms a magnified image of a focus spot located an object plane onto the image detector. The imaging system includes at least an objective lens. A sealed liquid container is secured over a part of the objective lens such as the optical surface of the objective lens is immersed in the liquid (e.g. water) within the container. The liquid container has a window through which the laser beam enters. An image processing method is also disclosed which processes the image obtained by the image detector to obtain the focus spot size while implementing an algorithm that corrects for the effect of ambient vibration.

公开(公告)号：US20230175838A1

公开(公告)日：2023-06-08

申请号：US18157729

申请日：2023-01-20

Applicant: AMO DEVELOPMENT, LLC

Inventor： Zheng Sun ,  Daniel Bray ,  Zenon Witowski ,  Timothy Slotterback ,  Hong Fu

IPC: G01B11/24

CPC classification number: G01B11/2408

Abstract: A measurement apparatus for measuring a laser focus spot size, which includes a two-dimensional image detector and an imaging system which forms a magnified image of a focus spot located an object plane onto the image detector. The imaging system includes at least an objective lens. A sealed liquid container is secured over a part of the objective lens such as the optical surface of the objective lens is immersed in the liquid (e.g. water) within the container. The liquid container has a window through which the laser beam enters. An image processing method is also disclosed which processes the image obtained by the image detector to obtain the focus spot size while implementing an algorithm that corrects for the effect of ambient vibration.

公开(公告)号：US10690486B2

公开(公告)日：2020-06-23

申请号：US16027137

申请日：2018-07-03

Applicant: AMO DEVELOPMENT, LLC

Inventor： Zheng Sun ,  Daniel Bray ,  Zenon Witowski ,  Timothy Slotterback ,  Hong Fu

IPC: G01B11/24

Abstract: A measurement apparatus for measuring a laser focus spot size, which includes a two-dimensional image detector and an imaging system which forms a magnified image of a focus spot located an object plane onto the image detector. The imaging system includes at least an objective lens. A sealed liquid container is secured over a part of the objective lens such as the optical surface of the objective lens is immersed in the liquid (e.g. water) within the container. The liquid container has a window through which the laser beam enters. An image processing method is also disclosed which processes the image obtained by the image detector to obtain the focus spot size while implementing an algorithm that corrects for the effect of ambient vibration.

公开(公告)号：US20200011659A1

公开(公告)日：2020-01-09

申请号：US16027137

申请日：2018-07-03

Applicant: AMO DEVELOPMENT, LLC

Inventor： Zheng Sun ,  Daniel Bray ,  Zenon Witowski ,  Timothy Slotterback ,  Hong Fu

IPC: G01B11/24

Abstract: A measurement apparatus for measuring a laser focus spot size, which includes a two-dimensional image detector and an imaging system which forms a magnified image of a focus spot located an object plane onto the image detector. The imaging system includes at least an objective lens. A sealed liquid container is secured over a part of the objective lens such as the optical surface of the objective lens is immersed in the liquid (e.g. water) within the container. The liquid container has a window through which the laser beam enters. An image processing method is also disclosed which processes the image obtained by the image detector to obtain the focus spot size while implementing an algorithm that corrects for the effect of ambient vibration.

公开(公告)号：US11852460B2

公开(公告)日：2023-12-26

申请号：US18157729

申请日：2023-01-20

Applicant: AMO DEVELOPMENT, LLC

Inventor： Zheng Sun ,  Daniel Bray ,  Zenon Witowski ,  Timothy Slotterback ,  Hong Fu

IPC: G01B11/24

CPC classification number: G01B11/2408

Abstract: A measurement apparatus for measuring a laser focus spot size, which includes a two-dimensional image detector and an imaging system which forms a magnified image of a focus spot located an object plane onto the image detector. The imaging system includes at least an objective lens. A sealed liquid container is secured over a part of the objective lens such as the optical surface of the objective lens is immersed in the liquid (e.g. water) within the container. The liquid container has a window through which the laser beam enters. An image processing method is also disclosed which processes the image obtained by the image detector to obtain the focus spot size while implementing an algorithm that corrects for the effect of ambient vibration.

公开(公告)号：US11561087B2

公开(公告)日：2023-01-24

申请号：US17452035

申请日：2021-10-22

Applicant: AMO DEVELOPMENT, LLC

Inventor： Zheng Sun ,  Daniel Bray ,  Zenon Witowski ,  Timothy Slotterback ,  Hong Fu

IPC: G01B11/24

Abstract: A measurement apparatus for measuring a laser focus spot size, which includes a two-dimensional image detector and an imaging system which forms a magnified image of a focus spot located an object plane onto the image detector. The imaging system includes at least an objective lens. A sealed liquid container is secured over a part of the objective lens such as the optical surface of the objective lens is immersed in the liquid (e.g. water) within the container. The liquid container has a window through which the laser beam enters. An image processing method is also disclosed which processes the image obtained by the image detector to obtain the focus spot size while implementing an algorithm that corrects for the effect of ambient vibration.