公开(公告)号：US20140250969A1

公开(公告)日：2014-09-11

申请号：US13793574

申请日：2013-03-11

Applicant: ANALOG DEVICES TECHNOLOGY

Inventor： Kamatchi Saravanan Alagarsamy ,  William A. Clark ,  Jishnu Choyi ,  James M. Lee ,  Vikas Choudhary

IPC: B81B7/02

CPC classification number: B81B7/02 ,  B81B7/008 ,  B81C99/005 ,  G01N35/00712

Abstract: A MEMS sensor includes a micro-electromechanical structure, a detection circuit, and a self-test circuit to test the health of the MEMS sensor during runtime operations. The self-test circuit is configured to inject into the micro-electromechanical structure a plurality of injected test signals that are broad-band frequency-varying frequency signals, which are based on spread spectrum based modulation. The injected test signals may a magnitude that is below an observable threshold of the sensor signal as well as a test-signal bandwidth that overlaps with a substantial portion of the sensor bandwidth, including the stimulus of interest.

Abstract translation: MEMS传感器包括微机电结构，检测电路和自检电路，以在运行时操作期间测试MEMS传感器的健康状况。 自检电路被配置为向微机电结构中注入多个基于扩频调制的宽带频率变化频率信号的注入测试信号。 注入的测试信号的幅度可能低于传感器信号的可观察阈值，以及与传感器带宽的大部分重叠的测试信号带宽，包括感兴趣的刺激。