公开(公告)号：US20170071053A1

公开(公告)日：2017-03-09

申请号：US15220387

申请日：2016-07-26

Applicant: AP SYSTEMS INC.

Inventor： Jae Seung LEE ,  Chang Won LEE

IPC: H05H1/46

CPC classification number: H05H1/46 ,  H05H2001/4645 ,  H05H2001/4682

Abstract: The present disclosure relates to a device for feeding high-frequency power and a substrate processing apparatus having the same, and more particularly, to a device for feeding high-frequency power, in which a matcher is integrated with a power divider and a substrate processing apparatus having the same. The device for feeding high-frequency power includes an input unit into which high-frequency power is inputted from a high-frequency power source, a plurality of output units in which the high-frequency power inputted into the input unit is divided and outputted, a plurality of variable capacitors connected between a division point at which the high-frequency power is divided and the plurality of output units, respectively, and a second variable capacitor connected between the input unit and the division point.

Abstract translation: 本发明涉及一种用于馈送高频电源的装置和具有该装置的基板处理装置，更具体地，涉及一种用于馈送高频电源的装置，其中匹配器与功率分配器和基板处理 具有相同的装置。 用于馈送高频电力的装置包括从高频电源输入高频电力的输入单元，分配输出输入到输入单元的高频电力的多个输出单元， 多个可变电容器分别连接在高频电源被分割的分割点和多个输出单元之间，以及连接在输入单元和分割点之间的第二可变电容器。