公开(公告)号：US20250164238A1

公开(公告)日：2025-05-22

申请号：US18511021

申请日：2023-11-16

Applicant: APPLIED MATERIALS, INC.

Inventor： Eric Chin Hong Ng ,  Todd Jonathan Egan ,  Mayu Felicia Yamamura ,  Phillip William Peters ,  Christopher Beaudry ,  Mehdi Vaez-Iravani

IPC: G01B11/30 ,  G01N21/88

Abstract: A system includes a radiation source configured to emit a radiation beam, a first optical sensor configured to detect a first intensity of a first portion of the radiation beam reflected from a surface of an object, a second optical sensor configured to detect a second intensity of a second portion of the radiation beam scattered by the surface of the object, and a third optical sensor configured to detect a third intensity of a third portion of the radiation beam scattered by the surface of the object. The system further includes a processing device communicatively coupled to the first optical sensor, the second optical sensor, and the third optical sensor. The processing device is configured to determine a roughness or an emissivity of the surface of the object based on a comparison of two or more of the first intensity, the second intensity, or the third intensity.