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公开(公告)号：US20190326090A1
公开(公告)日：2019-10-24
申请号：US15958562
申请日：2018-04-20
Applicant: APPLIED MATERIALS, INC.
Inventor： Hahn NGUYEN , Thai Cheng CHUA , Philip Allan KRAUS
IPC: H01J37/32
Abstract: Embodiments described herein include an applicator frame for a processing chamber. In an embodiment, the applicator frame comprises a first major surface of the applicator frame and a second major surface of the applicator frame opposite the first major surface. In an embodiment, the applicator frame further comprises a through hole, wherein the through hole extends entirely through the applicator frame. In an embodiment, the applicator frame also comprises a lateral channel embedded in the applicator frame. In an embodiment the lateral channel intersects the through hole.
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