公开(公告)号：US20160353522A1

公开(公告)日：2016-12-01

申请号：US15165377

申请日：2016-05-26

Applicant: APPLIED MATERIALS, INC.

Inventor： SAKET RATHI ,  Ananthkrishna JUPUDI ,  Mukund SUNDARARAJAN ,  Manjunath Handenahalli VENKATASWAMAPPA

IPC: H05B1/02 ,  H05B6/80 ,  H05B6/64 ,  F27B5/04 ,  F27B5/14

CPC classification number: H05B6/80 ,  F27B5/04 ,  F27B5/14 ,  H05B6/6402 ,  H05B6/6447 ,  H05B6/645

Abstract: In some embodiments, a process chamber for a microwave batch curing process includes: an annular body having an outer surface and an inner surface defining a central opening of the annular body, wherein the inner surface comprises a plurality of angled surfaces defining a first volume; a first lip extending radially outward from the outer surface of the annular body proximate a first end of the annular body; a second lip extending radially outward from the outer surface of the annular body proximate a second end of the annular body; an exhaust disposed between the first lip and the second lip and fluidly coupled to the first volume, wherein the exhaust comprises a plurality of first openings; a plurality of second openings fluidly coupled to the first volume, wherein the plurality of second openings are configured to expose the first volume to microwave energy; and one or more ports fluidly coupled to the first volume.

Abstract translation: 在一些实施例中，用于微波批量固化方法的处理室包括：环形体，其具有外表面和限定环形体的中心开口的内表面，其中内表面包括限定第一体积的多个倾斜表面; 靠近所述环形体的第一端从所述环形体的外表面径向向外延伸的第一唇缘; 靠近所述环形体的第二端从所述环形体的外表面径向向外延伸的第二唇缘; 布置在所述第一唇缘和所述第二唇缘之间并且流体地联接到所述第一体积的排气口，其中所述排气口包括多个第一开口; 多个第二开口，其流体地联接到所述第一容积，其中所述多个第二开口被配置为将所述第一容积暴露于微波能量; 以及流体地联接到第一容积的一个或多个端口。