公开(公告)号：US10945313B2

公开(公告)日：2021-03-09

申请号：US15165377

申请日：2016-05-26

Applicant: APPLIED MATERIALS, INC.

Inventor： Saket Rathi ,  Ananthkrishna Jupudi ,  Mukund Sundararajan ,  Manjunath Handenahalli Venkataswamappa

IPC: H05B1/02 ,  H05B6/80 ,  H05B6/64 ,  F27B5/04 ,  F27B5/14

Abstract: In some embodiments, a process chamber for a microwave batch curing process includes: an annular body having an outer surface and an inner surface defining a central opening of the annular body, wherein the inner surface comprises a plurality of angled surfaces defining a first volume; a first lip extending radially outward from the outer surface of the annular body proximate a first end of the annular body; a second lip extending radially outward from the outer surface of the annular body proximate a second end of the annular body; an exhaust disposed between the first lip and the second lip and fluidly coupled to the first volume, wherein the exhaust comprises a plurality of first openings; a plurality of second openings fluidly coupled to the first volume, wherein the plurality of second openings are configured to expose the first volume to microwave energy; and one or more ports fluidly coupled to the first volume.